2017 JSPE Autumn Conference
Session ID : N19
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Autumn Conference
Location : [in Japanese]
Date : September 20, 2017 - September 22, 2017
Fabrication of Multi-Electrode Array Using Backside Exposure Part II
Improvement of Adhesion Strength of Au Thin Films by a thermal treatment
Keywords:
bio sensor,
micro needl,
multi-electrode array,
backside exposure,
heat treatment,
spheroid
Details
