Proceedings of JSPE Semestrial Meeting
2017 JSPE Autumn Conference
Session ID : B14
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Autumn Conference

Location : [in Japanese]

Date : September 20, 2017 - September 22, 2017

Characterization of ion current on ion beam figuring for high precision optics
Koichiro Goto, Kouki Hiraishi, Hiroki Aihara, *Hideo Takino
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Keywords: Ion beam, Optics, Figuring, Measurement, Ion current, Machining
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Abstract
[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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