Fabrication of tungsten micro-rod using electrochemical machining method with neutral electrolyte

抄録

This paper describes the tungsten micro-rod machining with the neutral electrolyte and ultra-short pulse bipolar current supplied by the electrostatic induction feeding method. Since, the tungsten oxide layer can be removed by NaOH generated when the polarity of tungsten electrode is negative, it can be machined using neutral electrolyte and bipolar current. In order to control the working gap, the average gap voltage was measured and compared with the reference voltage. The ability of miniaturization machining of tungsten micro-rod was investigated with the electrostatic induction feeding ECM, and the micro-rod of 7.1 μm in diameter and 14 in aspect ratio was fabricated successfully.