2017 JSPE Spring Conference
Session ID : N34
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Development of Nanofabrication Technique with Catalytically Active Platinum-Coated AFM Probe (4th Report)
Localized Electrochemical Etching of ZnO Single Crystal in Water
Keywords:
Atomic force microscope (AFM),
Catalytically active platinum-coated probe,
Nanoscale catalytic chemical etching,
Nanofabrication,
Zinc oxide (ZnO),
MEMS
Details
