Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Conditioning method of polishing pad by ceramics flexible fiber conditioner
*Yutaro Arai, Michio Uneda
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Keywords: Conditioner, Polishing pad, Flexible fiber, Ceramics
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 495-496

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Abstract
[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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