Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Evaluation of adhesion force between silica abrasive and silicon oxide film by molecular dynamics method
*Koichi Masuya, Masashi Obuchi, Satomi Hamada, Masuhiro Mikami, Chikako Takatoh
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Keywords: CMP, molecular dynamics, substrate cleaning, abrasive, adhesion force, numerical analysis
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 497-498

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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