Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Development of two-beam interference exposure for X-ray grating -Improvement of fabrication accuracy-
*Yuh Kamata, Jianli Guo, Keiichi Nakagawa, Hidekazu Mimura
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Keywords: Diffraction grating, Holographic exposure, Dry etching
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 601-602

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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