2018 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2018 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2018 - March 17, 2018
Development of measurement and fabrication processes for mini-KB mirrors
*Takenori Shimamura, Hiroto Motoyama, Yusuke Matsuzawa, Hayato Nishioka, Hidekazu Mimura
Author information
Keywords:
Differential deposition,
KB mirror optical system,
Scanning white light interferometer,
Soft X-ray,
Ultimate focusing
Pages 599-600
Details
