Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Formation and evaluation of copper film by hydrogen plasma enhanced transport
*Yoshiki Shirasu, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
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Keywords: copper thin film, hydrogen plasma, LSI
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 625-626

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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