Proceedings of JSPE Semestrial Meeting
2018 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2018 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2018 - March 17, 2018

Improvement of copper dry etching characteristic of high-pressure hydrogen-based plasma by additive gases
*Hiromasa Ohmi, Jumpei Sato, Yoshiki Shirasu, Hiroaki Kakiuchi, Kiyoshi Yasutake
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Keywords: copper, dry etching, hydrogen, plasma, metal
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 623-624

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[in Japanese]
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© 2018 The Japan Society for Precision Engineering
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