2019 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2019 JSPE Spring Conference
Location : [in Japanese]
Date : March 13, 2019 - March 15, 2019
Evaluation of interaction between silica abrasive and PVA brush by molecular dynamics method
*Koichi Masuya, Masashi Obuchi, Satomi Hamada, Megumi Uno, Masuhiro Mikami, Chikako Takatoh
Author information
Keywords:
CMP,
Wafer cleaning,
Molecular dynamics,
Numerical analysis,
Abrasive grain,
Adhesion force
Pages 140
Details
