Proceedings of JSPE Semestrial Meeting
2019 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2019 JSPE Spring Conference

Location : [in Japanese]

Date : March 13, 2019 - March 15, 2019

The evaluation of hydration free energy during CMP process of glasses
Seiichi Suda, *Ryo Fukuzaki
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Keywords: glass, chemical mechanical polishing, ceria, hydration free energy
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 553

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Abstract
[in Japanese]
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© 2019 The Japan Society for Precision Engineering
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