Relationship between ultrasonic irradiation conditions and PZT thickening by ultrasonic assisted hydrothermal synthesis

Abstract

The hydrothermal synthesis method using ultrasonic wave promotes chemical reaction by cavitation effectIt is possible to deposit a PZT film having excellent piezoelectricity thickly on the titanium substrate.However, the relation between the sound pressure of ultrasonic waves causing cavitation and thickening has not been elucidated.Therefore, in this study, in order to prepare a thicker PZT film, we tried to find the optimum sound pressure condition by changing the sound pressure.Under the optimum conditions, it was possible to obtain a thick film of 17.8 μm which is about 8 times as large as the case without ultrasonic wave in the reaction for 24 hours.