The Structured Illumination Microscopy (SIM) with standing-wave illumination has been demonstrated to be applied as a lateral super-resolution method suitable for microstructure observation. The Finite-difference time-domain method (FDTD) simulation is applied to observe the electric and magnetic field of microgroove structure with standing-wave illumination in the near-field. The method using Fourier Filtering is proposed and evaluated step-by-step to distinguish the light component reflected from the structure. The analysis is essential to the proposal of a new three-dimensional super-resolution and non-destruction depth measurement method.
