2020 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Investigation of three dimensional polishing mechanism utilizing visualization technique of polishing interface
*Ryoichi Shiyama, Michio Uneda, Kyosuke Tenkou, Kazutoshi Hotta, Hitoshi Morinaga, Ken-ichi Ishikawa
Author information
Keywords:
3-D polishing tool,
Visualization,
Dynamical behavior,
Slurry spreading behavior,
Polishing interface temperature
Pages 654-655
Details
