We have developed a new PCD ball-end mill with spherical shaped to achieve the mirror finished surfaces on CNC machining center, in order to solve the long time and high-cost by manual polishing process. In this method, it is achieved that be able to control the plastic deformation with the surface roughness in nanometer scale. In this study, we experimentally investigated the chip formation mechanism under demonstration of the relationship of chip removal rate and the residual compressive stress under. Furthermore, the crystal structure of the cut surface has been investigated by using the scanning ion microscope SIM. As a result, the work-affected layer by the PCD ball-end mill was that strongly distorted has been clarified.