2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
Study on the three-dimensional coating and the evaluation of ta-C film properties prepared by FCVA method
*Yuki Hirata, Kotaro Kawai, Toyohiro Kato, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka, Hiroki Akasaka, Naoto Ohtake
Author information
Keywords:
FCVA method,
ta-C film
Pages 725-726
Details
