Rotational-Degree-Of-Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces

Abstract

The purpose of this study is to develop collective beam structure ESCs with elastic hinges as rotational-degree-of-freedom structure at the tip and to verify the influence of the structure while facing planar and curved surfaces. Electrostatic chucks (ESC) are devices used in wafer manipulation but can only deal with plain targets. Collective beam structure ESCs, although having the potential for dealing with curved surfaces, lack the compliance between tip and surface, resulting in poor performance. In this study, the elastic hinge is made from phosphor bronze and other structures are made by fused deposition modelling technology. The specification of the foot structure ESC is firstly determined through calculation. Then experiments are carried out at different positions on the plain and curved surfaces with collective beam structure ESCs with and without the hinge. The results of experiments are used to verify and analyze the influence of the elastic structure on the foot structure ESC while facing the planar and curved surfaces. In the end, the effect of elastic hinge is verified, and the results are expected to contribute to the development of foot structure ESC with higher performance facing different target surfaces.