Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

[title in Japanese]
*Tomohiro Ryo, Yuki Taoka, Shigeki Saito
Author information
Keywords: A bipolar electrostatic chucks with a compliant beam-array assembly, Electrostatic attractive force, Manufacturing system, Rotational degrees of freedom
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 782-783

Details
Download PDF (972K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2022 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top