Piezoelectric actuator with comprehensive performance of high-speed and high-precision positioning

抄録

Piezoelectric actuators have played a critical role in the field of precise positioning and driving. However, existing actuators cannot achieve the performance of high speed and positioning accuracy at the same time. Therefore, in this study, a piezoelectric actuator with triangular mechanisms that enables high-speed operation and high-precision positioning was proposed and fabricated. Experimental results indicated that the actuator can work in a wide range of driving frequencies. Under the resonance frequency of 14 kHz, the minimum voltage that could drive the actuator was 6 Vpp, and the maximum velocity of 24.6 mm/s was achieved at a voltage of 36 Vpp. Moreover, the proposed actuator could realize precise positioning under the non-resonance frequency. The positioning resolution of 144 nm was obtained, and the measured repeatability was ±25, ±35, ±40, and ±50 nm for four strokes of 325, 425, 625, and 725 nm, respectively.