2024 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2024 JSPE Spring Conference
Location : [in Japanese]
Date : March 12, 2024 - March 14, 2024
Flexible support table for fine positioning through attraction forces between permanent magnets (2nd. report)
Estimation of output displacement, axis interference and attitude error
Keywords:
Fine feed table,
Flexible support,
Sliding friction free,
Permanent magnet,
Axis interference,
Attitude error
Pages 373-374
Details
