Host: The Japan Society for Precision Engineering
Name : 2024 JSPE Spring Conference
Location : [in Japanese]
Date : March 12, 2024 - March 14, 2024
Pages 555-556
For the purpose of high efficiency polishing of diamond substrates, which are hard and fragile materials, we have developed fullerene C60 composite polishing fine particles. As a result of applying the developed fine particles to the polishing of the diamond substrate, it was confirmed that the material removal rate was improved and the surface roughness of the polished surface was reduced. In addition, a carbon allotrope different from fullerene C60 was confirmed in the process of making fine particles. In this talk, we will report on the outline of the developed fine particles and the polishing results.