Proceedings of JSPE Semestrial Meeting
2024 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2024 JSPE Spring Conference

Location : [in Japanese]

Date : March 12, 2024 - March 14, 2024

Development of a MRR observer for next generation CMP process control and its experimental validation
*Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Yuki Watanabe
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Keywords: polishing, CMP, model-based simulation, observer, parameter identification
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 692-693

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[in Japanese]
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© 2024 The Japan Society for Precision Engineering
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