Proceedings of JSPE Semestrial Meeting
2024 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2024 JSPE Spring Conference

Location : [in Japanese]

Date : March 12, 2024 - March 14, 2024

Miniaturization of Needle-like Resist Patterns Formed by Speckle Lithography
*Shogo Komiya, Tomoki Iwaoka, Toshiyuki Horiuchi, Hiroshi Kobayashi
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Keywords: Lithography, Speckle, Needle-like pattern, Miniaturization
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 758-759

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[in Japanese]
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© 2024 The Japan Society for Precision Engineering
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