2024 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2024 JSPE Spring Conference
Location : [in Japanese]
Date : March 12, 2024 - March 14, 2024
Nanoscratch Characteristics of C-plane Sapphire Substrate (3rd Report)
Differences in Phenomena between Single and Multi-scratch
*Jun Shimizu, Kengo Saegusa, Wangpiao Lin, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
Author information
Pages 760-761
Details
