半導体製造工程における品質工学の活用(2)

－フィードバック制御と損失関数－

抄録

In semiconductor fabrication processes, it is desirable to utilize on-line quality engineering to establish stabilized fabrication processes through optimized process control. In this study, for the purpose of establishing on-line engineering in semiconductor fabrication processes, a system that many people can utilize was studied and verified through practical use. In work analysis and loss calculations, an attempt was made to eliminate hesitation and improve working efficiency by standardizing data and creating tools that made the data more usable and more generally applicable. Through practice in actual processes and establishment of these methods, an increase in the use of on-line quality engineering was observed, and it was also shown that on-line quality engineering could uncover various problems present in process control.