TiAl intermatallic compound coatings for diamond polish were fabricated by mechanical alloying (MA) and thermal spraying in this study. Titanium powder and aluminum powder were mixed by MA method. Then the MA powder was used as the feedstock powder for low pressure plasma spraying (LPPS). It was possible to fabricate thick coatings with dense microstructure by controlling of MA time, spraying distance and chamber pressure. Furthermore, almost completely TiAl constituent coating was fabricated by controlling of Ti and Al powder mixing ratio upon the raw material of MA. The TiAl coating had good diamond polishing property. Therefore, thermal sprayed TiAl coating is suitable for the diamond polisher.
