プローブレーザビームを用いたエキシマレーザ誘起プラズマの解析

エキシマレーザによるアブレーション加工の基礎的研究(第2報)

抄録

We made time resolved measurements of laser-plasma interaction to study the effects of laser-induced plasma on laser processing during laser irradiation. A probe laser of 40 microns diameter was used for the measurements. The reduction of the probe laser intensity by laser-induced plasma was observed in the latter part of a laser pulse. The radial distributions of plasma absorption coefficients and removal depth were measured at various diameters of uniform intensity beams. A plasma absorption model where plasma expands vertically was developed and, using the model, the effect of laser-induced plasma on drilling speed was estimated.