RADIOISOTOPES
Online ISSN : 1884-4111
Print ISSN : 0033-8303
ISSN-L : 0033-8303
V. Manufacturing by Synchrotron Radiation
1. LIGA Process (Micromachine)
Hiroshi TAKADA
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Keywords: synchrotron radiation, micromachine, LIGA, lithography, electroplating, molding
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1998 Volume 47 Issue 9 Pages 721-726

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