Proceedings of the Annual Conference of the Institute of Systems, Control and Information Engineers
The 50th Annual Conference of the Institute of Systems, Control and Information Engineers
Session ID : 5W4-5
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Host: The Institute of Systems, Control and Information Engineers

A nonlinear system identification of the inpedance matching system for the plasma chamber in the semi-conductor production
*Youhei Hasegawa, Osamu Kaneko, Kazuyuki Matsumoto, Takao Fujii, Shuuictsu Fujii, Mitsuhiro Imai
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Keywords: Nonlinear system, Identification, MN Algorithm, Impedance Matching, Semiconductor Manifucturaing
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Abstract
In this talk, we present results on nonlinear system identification of the inpedance matching system for the plasma chamber in the semi-conductor production.We apply the mimimum norm method (which is abbreviated as MN) that is appropriate for identification of the system described by the series of linear dynamical and nonlinear static parts.
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© 2006 The Institute of Systems, Control and Information Engineers
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