Proceedings of the Annual Conference of the Institute of Systems, Control and Information Engineers
The 54th Annual Conference of the Institute of Systems, Control and Information Engineers
Session ID : F125
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Host: Institute of Systems, Control and Information Engineers

Electrostatic field measurement system and its application to human body
*Toshihide Kuriyama, Toshikazu Aoi, Hiroshi Maeda, Takaki Itoh, Yoshifumi Ueno, Toshiyuki Nakaie, Nobutika Matsui, Hiroyuki Okumura
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Keywords: Electrostatic field, MEMS, Semiconductor micro-fabrication process, human body
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Abstract
A micro-mirror array fabricated by MEMS process has been made for electrostatic field measurement. Each micro-mirror is suspended by thin wires, which is made by silicon miniaturization process. Deflection of the mirror by electrostatic field is measured optically. The elctrostatic field measuremnt system was applied to human body.
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© 2010 The Institute of Systems, Control and Information Engineers
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