学術講演
MEMS: From Development to Production
2000 年 52 巻 6 号 p. 282-285
詳細
2000 年 52 巻 6 号 p. 282-285
Micro Electro Mechanical Systems (MEMS) are in the phase of transition from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The R&D activities at HSG-IMIT in Germany are described. The last chapter outlines the cooperation between the R&D institution and industry, in particular with local German small and medium sized enterprises.
