Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
MEMS, Growing Business and Growing Market with a Wide Field of Applications
Yoko OGAWA
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Keywords: MEMS, Foundry, Micro-mirrors, Switches, Sensors, Design and Analysis Tool
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2003 Volume 54 Issue 10 Pages 635-639

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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