Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Surface Micro-Fabrication and Integration for Optical MEMS
Kazuhiro HANE, Minoru SASAKI, Yoshiaki KANAMORI
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Keywords: Silicon Micromachining, Optical MEMS, Optical Switch, Optical Scanner
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2003 Volume 54 Issue 10 Pages 640-643

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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