2009 年 60 巻 10 号 p. 668
We investigated electroless aluminum plating using AlCl3-1-ethyl-3-methylimidazolium chloride (AlCl3-EMIC) ionic liquid containing diisobutyl aluminum hydride (DIBAH) and BiCl3. The plating film was analyzed using X-ray diffraction and scanning electron microscopy. The aluminum films prepared with BiCl3 were smoother than those prepared without BiCl3. Furthermore, the plating bath stability was improved by addition of BiCl3.