表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
最新号
選択された号の論文の2件中1~2を表示しています
研究論文
  • 石川 豊, 齋藤 駿介, 及川 朱
    2021 年 72 巻 9 号 p. 499-502
    発行日: 2021/09/01
    公開日: 2021/09/02
    ジャーナル フリー

    This study examined growth of single-walled carbon nanotubes (SWCNTs) by hot-filament chemical vapor deposition at low temperatures using a double-layer film consisting of iron and cobalt layers as a catalyst. Ethanol was used as the carbon source. At a 350 ℃ growth temperature, few SWCNTs were grown when only cobalt film was used as the catalyst, although SWCNT growth was confirmed when a double-layer film consisting of iron and cobalt layers was used as the catalyst. The optimal combination for use as the catalyst is iron oxide in a layer (thickness before oxidation, 1.2 nm) on the cobalt oxide in a layer (thickness before oxidation, 1.0 nm). By reduction of these films at 400 ℃ for 30 min, followed by CNT growth at 350 ℃ for 30 min, a vertically aligned SWCNT film with 3.2 μm thickness was obtained.

  • 高山 昌敏, 井上 浩徳, 渡邊 充広
    2021 年 72 巻 9 号 p. 503-507
    発行日: 2021/09/01
    公開日: 2021/09/02
    ジャーナル フリー

    Glass substrates with through-glass vias (TGVs) are being developed to improve large-volume and high-speed data communications technologies. To use the substrate as a circuit board, it is necessary to apply highly conductive Cu film on the glass substrate and to form uniform Cu film, even inside through holes. However, forming a uniform metal film on high-aspect-ratio through holes is difficult using conventional high-vacuum sputtering. Therefore, we specifically examined the throwing power of low-vacuum sputtering and formed a Cu film inside through holes of the TGV substrate using a wet plating process combined with sputtering. By selecting an appropriate Cu-plating solution and by optimizing Cu-plating conditions and plated film properties, annealing conditions, and an oxide film form method, we achieved 1.0 kN/m adhesion strength for a Cu film formed directly on a glass substrate. Results of our study also suggest the possibility of performing conformal plating on through holes having a 3.75 aspect ratio(0.3 mm glass thickness, φ80 μm opening diameter).

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