研究論文
感光性エポキシ樹脂SU-8表面の濡れにおよぼす微細凹凸形状とプラズマ改質の影響
2011 年 62 巻 3 号 p. 184
詳細
2011 年 62 巻 3 号 p. 184
This paper describes effects of micro-square-shaped pillar array structures and chemical modification by SF6 or O2 plasma irradiation on wetting properties of SU-8 (photosensitive epoxy resin) for water. Contact angles were measured and microscopic observation of water droplet contours were conducted through the bottom of the glass substrate. For the SU-8 surfaces without chemical modification, Wenzel mode wetting occurred constantly. However, because of the pinning effect, the contact angles on surfaces with micro structures were larger than the values calculated based on the Wenzel mode wetting. The SU-8 surfaces modified by SF6 plasma showed Cassie mode wetting generally and remarkable hydrophobicity with large contact angles of more than 150 deg. The surface became super-hydrophilic after O2 plasma modification.
