抄録
Transparent heat-mirror insulation films comprising a multilayer of AlN/Al/AlN were fabricated using new magnetic hollow-cathode sputtering. Electrical and optical properties of multilayer films were examined. Visible transmission of 78 % (at 0.5 μm) and infrared transmission of 30 % (at 1.0 μm) were obtained for a three-layer film of AlN (30 nm) / N-doping Al (9 nm) /AlN(30 nm)on PET films.
