ソリューションプラズマを用いて作製した酸化亜鉛ナノ粒子の粒径に及ぼすプラズマ生成パラメータの影響

抄録

The optical and electronic performance of zinc oxide nanoparticles, which are widely used as optical and electronic materials, depends on the nanoparticle properties. The particle size is a particularly important factor affecting material properties. This study was conducted to elucidate the relation between the size of nanoparticles synthesized by solution plasma and each of several plasma formation parameters such as applied voltage, pulse width, and repetition frequency. The zinc electrodes were used to generate solution plasma. The zinc oxide nanoparticles were synthesized in solution plasma using a sputtering process. The synthesized nanoparticle shape was non-spherical. The nanoparticles were smaller than 100 nm along the long axis. Electrode sputtering occurred mainly on the cathode electrode. Therefore, positive ions in the solution plasma, e.g. H₂O⁺ and H₃O⁺, affect the zinc oxide nanoparticle formation. However, the particle size was correlated with the applied voltage between electrodes, not with the pulse width or pulse repetition frequency.