研究論文
大気圧プラズマ処理による純銅表面での微細突起形成
2019 年 70 巻 9 号 p. 471-476
詳細
2019 年 70 巻 9 号 p. 471-476
Atmospheric pressure plasma treatment has potential as a pretreatment of material for bonding strength improvement. To produce a textured surface on a copper substrate, we specifically examined atmospheric pressure plasma treatment. The surface-morphology change of plasma treatment alone was very slight, but that of plasma treatment with stearate acid films created a textured surface with fine protrusions of several tens of nanometers, as observed using AFM or TEM. Furthermore, the chemical components of the textured surface were analyzed using AES. Results demonstrate that the fine protrusions consist mainly of Cu2O, but flat parts of the textured surface were only slightly oxidized. The stearate acid film prevents oxidation on flat parts of the copper substrate. Subsequent plasma treatment formed selective oxidized fine protrusions on the copper. Atmospheric pressure plasma treatment readily promotes metal oxide Cu2O by the formation of oxygen atomic radical. Results of surface measurements and analyses suggest that the combination of atmospheric pressure plasma treatment with stearate acid films produced a nanoscale textured surface with fine protrusions on copper substrates.
