六フッ化タングステンよりのタングステンカーバイドの生成

抄録

Tungsten carbide films were prepared at 300-700°C from a WF₆+H₂+C₆H₆ reaction system. W₃C films were obtained at 300°C, and W₂C films at 450°C. Hardnesses were as high as 2500-3000HmV.