表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
高純度銅原料を用いた銅蒸着膜のめっき特性
御田 護
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ジャーナル フリー

1997 年 48 巻 5 号 p. 539-543

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Dendrite growth and the method of preventing the dendrite growth in nickel electroplating were studied on photochemically etched patterns of vapor depositing copper using a 99.99mass% (4N) copper source.
Soft chemical etching and increasing the plating power source ripple were found to be effective in preventing the dendrite growth. No dendrite growth with copper pattern formed using a 6N copper source or rolled or electrodeposited copper foil. It was found that copper patterns formed with a 6N copper source had higher resistivity in high temperature and high humidity testing than patterns formed with a 4N copper source.
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