抄録
We have analyzed the interfaces in Auger depth profiles, for the Ni/Cr multilayer specimen, the GaAs/AlAs superlattice specimen and the InP/GaInAsP multilayer specimen, using curve fitting process by the logistic function. In consequence, the calculated fitted profile curves are in very good agreement with the measured points. Moreover, it has been found that the depth resolution function is expressed by two parameters of the interface-width and the asymmetry. In this report, we recommend that the surface roughening effect and atomic mixing effect are clearly shown using these two parameters.
