抄録
Direct humidification using compressed air atomizer is one of the conventional methods at printing factory. Atomized water removes heat from air when it evaporates so it contributes to both energy-saving humidification and air-cooling. In winter, at semiconductor factory, there is huge amount of humidification and air-cooling but the conventional atomizing system cannot keep the factory with constant humidity. We have improved the control system that can keep the humidity constant using dual control valves. The valves are controlled each opening rate by analog IO calculation unit. It makes the droplets size to fixed and the amount of air to minimum and also can keep the humidity inside f3%. Now we will introduce the result of saving-energy at semiconductor factory in which this system have newly added.
