Abstract
In semiconductor fabrication and other fine-processing fields, measurements and precision processes have become common. This has generated a need for precision temperature-control systems that minimize temperature fluctuations, which can have a negative effect on measurement accuracy. This report investigates characteristics of a special responsive-heater and heat accumulators by analysis and experiments, and optimization of a combination of a special responsive-heater and accumulators. The results of this study were applied to a high-precision temperature-control system achieving an air-temperature variation within ±0.001℃.
