Ultra-precision Air-pin Sensor and its Dynamic characteristic research

Zhang Hui; Chen Shan; Deng Shanxi; Wang Huiqing

doi:10.11499/sicep.2002.0.475.0

SICE Annual Conference 2002

DOI https://doi.org/10.11499/sicep.2002.0.475.0

会議情報

主催: The Society of Instrument and Control Engineers

共催: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society

Ultra-precision Air-pin Sensor and its Dynamic characteristic research

Zhang Hui, Chen Shan, Deng Shanxi, Wang Huiqing

著者情報

キーワード: Pneumatic measurement, Sensor, Air-pin orifice, Dynamic characteristic

会議録・要旨集フリー

p. 475

詳細

抄録

Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10μm in the measurement range, and its measurement accuracy is better than 0.1μm, and its response time is less 10ms.

責任著者(Corresponding author)

J-STAGEへの登録はこちら（無料）