抄録
In this paper, a novel method to realize high-speed dimensional inspection of 3D shapes is proposed, by means of a bilateral vibration touch probe that outputs feedback voltage in accordance with its position. Dimensional inspection can be performed by both of measuring several characteristic points, and of interpolating by least square method. A method of measurering the specified several characteristic points is used for shortening the measurement time, where it is assumed that rough positions of the characteristic point are provided. A new method using the bilateral vibration touch probe for dimensional inspection is proposed, and the effectiveness of the proposed method is demonstrated by experiments.
