複合物理領域での定温度制御方式熱式流量計のモデル化

抄録

The thermal flow sensors are widely accepted in semiconductor industry because they can measure the flow rate of various types of gases based on each reference flow data. However, it is difficult to obtain such data for some reactive gases because due to corrosion of the gas measurement system. To overcome such difficulties, this paper proposes a multi-domain physical model of the thermal based flow sensor taking account of both electrical and thermal characteristics. The proposed model is analyzable based on the physical properties of the target gas, and its validity is demonstrated through comparison with experimental data.