Transactions of the Society of Instrument and Control Engineers
Online ISSN : 1883-8189
Print ISSN : 0453-4654
ISSN-L : 0453-4654
An Insitu Measurement of Very Small Ball Produced from Electrical Spark Using Laser Diffraction
Toshihiko OHSAWA, Tadao OZAKI
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Keywords: micro-ball diameter, laser diffraction, IC bonding, insitu measurement
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1988 Volume 24 Issue 7 Pages 753-754

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Abstract
Small ball which has several nanometers in diameter is generated at the tip of fine gold wire. The ball size is measured in process just after formation in bonding process of IC fabrication.
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© The Society of Instrument and Control Engineers (SICE)
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