A new high speed photometric ellipsometer consisting of simple optical elements, electronics, and personal computer is developed. Data acquisition time of the new ellipsometer is only limited by the response time of the photodetector's circuitry. This ellipsometer, having no moving parts, is suitable for measuring film thickness moving fast in the process line, where no conventional ellipsometer can be applied.
In this proposed apparatus, a certain polarized light (ex. linearly or circularly) is used as an incident beam and the reflected beam from the object is split into 3 beams through the beam splitter which consists of 3 or 4 optical pararells. The intensity of each beam transmitted through the analyzer with a certain azimuth angle is measured by the photodetector.
Each intensity signal multiplied by the gain factor for each channel, denoted by
I1,
I2,
I3, can be used to derive the two ellipsometric parameters. The analysis with Jone's vector representation shows that the ellipsometric parameters cosΔ, tanψ are expressed as follows; cosΔ=
I3-
I2/2
I1√
I1/
I2+
I3-
I1, tanψ=σ
1σ
2√
I1/
I2+
I3-
I1where incident beam is linearly polarized (azimuth -45°), the azimuth angle of each analyzer is 0° (ch. 1), 45° (ch. 2), -45° (ch. 3) respectively, and σ
1σ
2 is a constant determined by the refractive index and the angle between the reflected beam and the beam splitter.
The precision of cosΔ and tanψ by this ellipsometer is on the order of 5.0×10
-4.
This new ellipsometer is applied to measure oil film with thickness of order 0-100Å coated on tinned steel sheet moving at a speed of 300m/min. In this case, the following considerations are further taken into account.
1. Linear relation between ellipsometric parameter cosΔ and film thickness
d is used.
2. Two lasers (He-Ne laser, Ar laser) with different wavelength λ
1, λ
2 are used to eliminated the ellipsometric parameter cosΔ
0 of substrate which changes continuously.
Oil film thickness measured by the new ellipsometer and those by conventional off-line method (hydrophil balance method) are agreed within the uncertainly of 1mg/m
2 (corresponding thickness is about 11Å).
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